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Von Ardenne Sputter, 2 Cluster Tool - Model CF 850S, Turbo pump, Brooks Robot

$595,000.00

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Condition : 

For parts or not working

Product Details
Item specifics
MPN : CF850S
Equipment/Component Type : Sputter Tool
Brand : Von Ardenne

Please contact us for the shipment arrangement.

Von Ardenne Sputter, 2 Cluster Tool - Model CF 850S, Turbo pump, Brooks Robot
Many parts or components.

Von Ardenne cluster tool details
Huttinger PFG 3000 DC 0946868 V 01/04 RF Generators qty 2
Huttinger PFG 2500 RF 457668 V 02/01 RF Generators qty 1
Huttinger PFG 1000 RF 0457656 V 06/04 B RF Generators qty 1
Huttinger PFG 1000 RF 1268387 V 01/03 RF Generators qty 1
Huttinger PFG 600 RF 457638 V 01/01 RF Generators qty 1
Huttinger PFM 1500A 952756 V02-00/98 match network qty 1
Huttinger PFM 1500A 952756 V01/04 match network qty 1
Huttinger PFM 3000A 991239 V02-00/98 match network qty 1
Huttinger PFM 3000A 989213 V02-00/98 match network qty 2
Advanced Energy MDX 500 MN3152384-001B DC Sputter Power Supply qty 1
Advanced Energy MDX 1.5k qty 2
DESA motor controllers qty 4
Dresden Electronics Industrial computer qty 2
Pfiefer TMH 1601 Turbo pump qty2
Pfeiffer TMH 1001 Turbo pump qty 1
Pfeiffer TMH 531 Turbo pump qty 1
PRI VAC409 Robot with ESC 200V Controller
Brooks 6-002-0014-SP robot with ESC 200V Controller
Harmonic drive RHS 17 qty 1
Harmonic drive RH140 qty 2
VAT gate valves qty 4

Some parts may be missing due to use, handling and removal from the facility. It looks complete and powered up in a Fab in the San Jose area when pictures were taken. Item has scratches and markings along the surface. There is residue from use. We clean and wipe outside of the tool. Farmon Inc. has diligently and with reasonable efforts flushed, drained, and cleaned property-containing chemicals. However, said property may contain chemical residue despite such efforts. Buyer acknowledges this fact and agrees to indemnify Farmon Inc. against any and all claims or actions for damage or other relief that may arise due to the property containing such chemical residue. Buyers are responsible to come and inspect and test the equipment prior to the purchase. We are selling as used, see pictures for more details.


Price is for the whole tool.


Customers will arrange for shipping, crating and rigging charges.


We describe the items and the condition as best we can, if there are any questions or you need more info, please contact us and we will reply the same day. No other accessories are being sold with the item (cables, manuals, software, etc.), unless it is mentioned in the description and shown in the picture. we do not have the capability to test these equipment, these are untested and we sell as is, see pictures for more detail.


Farmon Inc. sells all equipment with no warranty, expressed or implied regardless of condition. Farmon inc. don't have the capability to verify this equipment. All sales are "As is and Where is" and are final with no returns or exchanges permitted. Farmon Inc. invites you to inspect our products prior to purchase. Please email or call us to schedule a time. Please read our rules before buying our products.


- Buyer is responsible for all shipping and handling costs, including any applicable insurance, taxes, tariffs or duties. buyer pays actual shipping charges using your UPS or FedEx account.

- There will be a $0 handling fee for US and a $0 handling fee for International for this item.

- Please allow 3 business days for us to ship after payment is received.

- All buyers are welcome and inspect the equipment before purchasing them. Please email or contact us for more information.

- Buyer must sign shipping confirmation when item is delivered. Whenever necessary.

- All sales are final and no returns are accepted.


Farmon Inc.

562 South Milpitas Blvd.

Milpitas, CA 95035



Hours of Operation: Mon-Fri 9am-4pm (PST/GMT-8)

Saturday and Sunday by appointment.


We are also interested in your unwanted or excess inventory.  Please contact us for review and removal of your inventory.


We supply many other semiconductor components/equipment such as RF generators, chillers, turbo pumps, cryo pumps, MFC's, vacuum pumps and controllers, step motors and drivers, etc.

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