Tokyo Electron ES1D101-204310C11 Upper Electrode, SHOWER HEAD, 103212

Tokyo Electron ES1D101-204310C11 Upper Electrode, SHOWER HEAD, 103212 is a semiconductor process component designed for precision plasma or gas distribution applications in wafer fabrication equipment. Built for use in demanding production environments, this upper electrode supports controlled process performance where consistency, repeatability, and equipment compatibility matter. It is suited to facilities that require a documented replacement part for maintenance, refurbishment, or line support.

Overview of the Upper Electrode

This upper electrode addresses the need for a reliable replacement or service part in semiconductor tool maintenance. The SHOWER HEAD configuration is commonly associated with process gas distribution at the chamber level, making this component relevant in applications where uniform delivery and stable process conditions are important. Buyers in fabs, equipment service teams, and parts procurement operations can use this part when matching an existing assembly to a known model and part number.

The ES1D101-204310C11 designation and 103212 reference help identify the part for sourcing and inventory control. When uptime and part traceability are priorities, having the correct upper electrode reduces the risk of mismatched replacements and supports faster maintenance cycles.

Key Features of the Upper Electrode

• SHOWER HEAD Design: The shower head style supports distributed process delivery at the chamber level. This format is commonly used where even flow distribution is needed for semiconductor processing.
• Identified by Model and Reference Numbers: The ES1D101-204310C11 designation and 103212 reference provide clear part identification for procurement, maintenance records, and cross-checking against existing equipment lists.
• Upper Electrode Form Factor: As an upper electrode, this part is intended for chamber-level integration in compatible process tools. It is a functional replacement component rather than a general-purpose consumable.
• Production Support Use Case: This component is suitable for facilities managing tool uptime, scheduled maintenance, and repair workflows. It helps keep equipment service aligned with documented part numbers.
• Semiconductor Equipment Application: The part is intended for semiconductor processing environments, where component accuracy and repeatable operation are essential to process stability.

Technical Specifications of the Upper Electrode

• Product Name: Tokyo Electron ES1D101-204310C11 Upper Electrode, SHOWER HEAD, 103212
• Brand/Manufacturer: Tokyo Electron
• Model/SKU: ES1D101-204310C11
• Product Type: Upper Electrode
• Configuration: SHOWER HEAD
• Reference Number: 103212

Applications for the Upper Electrode

• Replacement part sourcing for semiconductor fabrication equipment maintenance teams.
• Inventory support for spare parts programs in wafer processing facilities.
• Tool refurbishment and repair for chambers requiring an upper electrode assembly.
• Procurement matching for equipment service providers working from part numbers.
• Production line support where documented component identification is necessary.

Compatibility & Cross-References for the Upper Electrode

Compatibility should be verified against the equipment bill of materials, chamber configuration, and existing part documentation before purchase. The ES1D101-204310C11 model and 103212 reference are the key identifiers available for matching this component to the correct tool setup.

• Manufacturer: Tokyo Electron
• Model/SKU: ES1D101-204310C11
• Reference Number: 103212
• Configuration: SHOWER HEAD

For cross-reference work, use the exact part number supplied on the equipment records or replacement list. This helps reduce sourcing errors and supports accurate spare part management in semiconductor operations.

FAQ for the Upper Electrode

Is this part suitable for semiconductor equipment?
Yes. This Tokyo Electron upper electrode is intended for semiconductor processing applications.

What identifiers should I use when ordering?
Use ES1D101-204310C11 and reference number 103212 to match the part accurately.

What does SHOWER HEAD indicate?
It refers to the electrode configuration, which is associated with distributed process delivery in chamber applications.

Should compatibility be checked before purchase?
Yes. Confirm the part number and equipment documentation to ensure the correct fit for your tool.