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Milpitas, CA
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  3. Novellus Inova XT PVD 300mm Wafer, Complete Tool, 113479

Novellus Inova XT PVD 300mm Wafer, Complete Tool, 113479

$250,000.00

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Condition : 

Used

Product Details
Item specifics
Brand : Novellus
Model : PVD
MPN : Inova XT PVD

Please contact us for shipping and crating information.

Novellus Inova XT PVD 300mm wafer, Sputter, Preclean, Dual Brooks Robot Transfer, Complete Tool

Seems to be complete. No manual. Any software licensing is buyer's responsibility.

Farmon ID: 113479

Tool Configuration:

- MAG7 Brooks Robots
- MC3 Novellus Module controller
- Pfeiffer Turbo and turbo controller
- 3 CTI/Hilex/Brooks Cryo pump
- Brooks FOUP cassette wafer loader
- VAT throttle valve and controllers
- AE PDX 5000 RF Generator
- AE RFG 5500 RF Generator
- MKS RF Generator
- DC power supply
- Right Degas Chamber
- PVD chamber
- Preclean Chamber
- Left Degas Chamber
- Transfer Module with dual blade
- And many more

OEM

Part Number

Item Title

Qty

Condition

Trek

PA07060

Trek PA07060 Power supply

1

Used

Sorensen

DCS80-13E

SORENSEN DCS80-13E 0-80V , 0-13A / 1000W PROGRAMMABLE DC POWER SUPPLY

2

Used

CPI

CPW2870B10

CPI CPW2870B10 Power Supply, 27-251231-00 DC Sputtering Power Supply

1

Used

Advanced Energy

3155051-015A

AE RFG 5500 M/N 3155051-015A RF Generator

1

Used

TREK

684-1

TREK 684-1, 6 Phase ESC Power Supply, Novellus R19-137359-00, 416092

1

Used

MKS

RPG-50

MKS Instruments RPG-50A Bipolar Pulsed DC Generator ENI RPG-50

1

Used

Advanced Energy

27-156757-00

AE PDX 5000 rRF Generator, M/N: 3156043-204, P/N:27-156757-00

1

Used

Novellus

03-12785-00

02-128733-00,03-12785-00 SIOC CONTROLLER ASSY PVD-MOD SIOC 1 NOVELLUS

1

Used

Novellus

02-288084-00

NOVELLUS / 02-288084-00 / WTS-HV SESIOC 0, Rev.A

1

Used

Novellus

02-271697-00

NOVELLUS 02-271697-00 / WTS-HV SESIOC 3 IXT, Rev.A

1

Used

Novellus

02-266875-00

NOVELLUS 02-266875-00 4 IXT WTS HV 4

1

Used

Novellus

02-253704-00

Novellus 02-253704-00 ASSY Mc3e Module Controller with Ethernet 75-261867-00

1

Used

Novellus

02-257935-00

Novellus 02-257935-00 MC3E Platform Controller with Ethernet 79-257795-00

1

Used

MKS

651D-16202

Throttle Valve Contr MKS 651D-16202 Throttle Valve Controller

2

Used

Pfeiffer

TMH 071 P

Pfeiffer Balzers TMH 071 P Turbomolecular

1

Used

VAT

02112-BA24-APN1/0022

VAT 02112-BA24-APN1/0022 Rectangular Gate Valve Pneumatic Actuator A-290319

1

Used

VAT

02112-BA24-APN1/0017

VAT 02112-BA24-APN1/0017 Rectangular Gate Valve Pneumatic Actuator A-276468

1

Used

VAT

02112-BA24-APN1/0018

VAT 02112-BA24-APN1/0018 Rectangular Gate Valve Pneumatic Actuator A-276468

1

Used

VAT

02112-BA24-APN1/0002

VAT 02112-BA24-APN1/0002 Rectangular Gate Valve Pneumatic Actuator A-335571

1

Used

VAT

02112-BA24-APN1/0008

VAT 02112-BA24-APN1/0008 Rectangular Gate Valve Pneumatic Actuator A-276468

1

Used

VAT

02112-BA24-APN1/0016

VAT 02112-BA24-APN1/0016 Rectangular Gate Valve Pneumatic Actuator A-276468

1

Used

VAT

02112-BA24-APN1/0024

VAT 02112-BA24-APN1/0024 Rectangular Gate Valve Pneumatic Actuator A-290319

1

Used

VAT

02112-BA24-APN1/0019

VAT 02112-BA24-APN1/0019 Rectangular Gate Valve Pneumatic Actuator A-288644

1

Used

VAT

02112-BA24-APN1/0004

VAT 02112-BA24-APN1/0004 Rectangular Gate Valve Pneumatic Actuator A-276468

1

Used

VAT

02112-BA24-APN1/0002

VAT 02112-BA24-APN1/0002 Rectangular Gate Valve Pneumatic Actuator A-276468

1

Used

VAT

02112-BA24-APN1/0434

VAT 02112-BA24-APN1/0434 Rectangular Gate Valve Pneumatic Actuator A-529666

1

Used

VAT

02112-BA24-APN1/0023

VAT 02112-BA24-APN1/0023 Rectangular Gate Valve Pneumatic Actuator A-290319

1

Used

Pfeiffer

TMU521P, PM P03 120H

Pfeiffer TMU521P, PM P03 120 C with TC750-E74, PM C01 712, Turbo Pump

1

Used

Pfeiffer

TMU521P, PM P02 855

Pfeiffer TMU521P, PM P03 855 with TC750 SPECIAL DS15, PM C01 711, Turbo Pump

1

Used

Pfeiffer

TMH 071 P

Pfeiffer Balzers TMH 071 P Turbomolecular PUMP with TC750-E74, PM C01 712

1

Used

CTI

8116079G001

CTI CRYGENICS 8116079G001 CRYOPUMP, CTI CRYOGENICS HELIX CONTROL SPUTTERING

1

Used

VAT

14036-PE24-0004

VAT, Gate Valve 14036-PE24-0004

1

Used

BROOKS

003-1600-25

BROOKS 003-1600-25 MAGNATRAN 7 MAG7 WAFER TRANSFER ROBOT

1

Used

BROOKS

002-7090-03

BROOKS 002-7090-03 WAFER TRANSFER ROBOT

1

Used

Pfeiffer

TMU 1001 P

PFEIFFER VACUUM TMU 1001 P TURBO PUMP PM P02 875, DN 200CF-F, 3P WITH  TC-750 SPECIAL DS15 PMC01 711

1

Used

Novellus

27-265775-00

Novellus 27-265775-00 AE MERCURY 3013 MATCH, 3150274-009

1

Used

Price is for the whole tool. As seen in pictures.


Item has scratches and markings along the surface as shown in the pictures. There is residue from use, we clean and wipe out outside of the tool. Inside will not be cleaned, customers will purchase this as is. Customers will arrange for shipping and crating and rigging charges. Farmon Inc. has diligently and with reasonable efforts flushed, drained, and cleaned property-containing chemicals. However, said property may contain chemical residue despite such efforts. Buyer acknowledges this fact and agrees to indemnify Farmon Inc. against any and all claims or actions for damage or other relief that may arise due to the property containing such chemical residue. Buyers are responsible to come and inspect and test the equipment prior to the purchase. We are selling as used, see pictures for more details.


Customers will arrange for shipping, crating and rigging charges.
Please contact us if you need more information or arrange for shipment.

We describe the items and the condition as best we can, if there are any questions or if you need more info, please contact us and we will reply the same day. No other accessories are being sold with the item (cables, manuals, software, etc.), unless it is mentioned in the description and shown in the picture. we do not have the capability to test these equipment, these are untested and we sell as is, see pictures for more details.


Farmon Inc. sells all equipment with no warranty, expressed or implied regardless of condition. Farmon inc. don't have the capability to verify this equipment. All sales are "As is and Where is" and are final with no returns or exchanges permitted. Farmon Inc. invites you to inspect our products prior to purchase. Please read our rules before buying our products.


- Buyer is responsible for all shipping and handling costs, including any applicable insurance, taxes, tariffs or duties. buyer pays actual shipping charges using your UPS or FedEx account.

- There will be a $0 handling fee for US and a $0 handling fee for International for this item.

- Please allow 3 business days for us to ship after payment is received.

- All buyers are welcome and inspect the equipment before purchasing them. Please email or contact us for more information.

- Buyer must sign shipping confirmation when the item is delivered. Whenever necessary.

- All sales are final and no returns are accepted.


Farmon Inc.

562 South Milpitas Blvd.

Milpitas, CA 95035


Hours of Operation: Mon-Fri 9am-4pm (PST/GMT-8)

Saturday and Sunday by appointment.


We are also interested in your unwanted or excess inventory.  Please contact us for review and removal of your inventory.


We supply many other semiconductor components/equipment such as RF generators, chillers, turbo pumps, cryo pumps, MFC's, vacuum pumps and controllers, step motors and drivers, etc.

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